Telemetric surface acoustic wave sensor for humidity
- Faculty for Computer Science, Electrical Engineering and Mathematics, Sensor Technology Department, University of Paderborn, Warburger Str. 100, 33098 Paderborn, Germany
Abstract. Surface acoustic wave sensors consist of a piezoelectric substrate with metal interdigital transducers (IDT) on top. The acoustic waves are generated on the surface of the substrate by a radio wave, as it is well known in band pass filters. The devices can be used as wireless telemetric sensors for temperature and humidity, transmitting the sensed signal as a shift of the sensor’s resonance frequency.