Accurate modeling of high frequency microelectromechanical systems (MEMS) switches in time- and frequency-domainc
- 1Technische Universität München, Lehrstuhl für Hochfrequenztechnik, Munich, Germany
- 2Dipartimento di Elettronica ed Automatica, University of Ancona, Ancona, Italy
Abstract. In this contribution we present an accurate investigation of three different techniques for the modeling of complex planar circuits. The em analysis is performed by means of different electromagnetic full-wave solvers in the timedomain and in the frequency-domain. The first one is the Transmission Line Matrix (TLM) method. In the second one the TLM method is combined with the Integral Equation (IE) method. The latter is based on the Generalized Transverse Resonance Diffraction (GTRD). In order to test the methods we model different structures and compare the calculated Sparameters to measured results, with good agreement.