A torsional sensor for MEMS-based RMS voltage measurements

Abstract. RF voltage measurement based on electrostatic RMS voltage-to-force conversion is an alternative method in comparison to the conventional thermal power dissipation method. It is based on a mechanical force induced by an RF voltage applied to a micro-mechanical system. For a theoretically adequate resolution and high precision measurements, the necessary geometrical dimensions of the sensor require the application of micro machining. In this contribution, the dependence between electrical and geometrical properties of different sensor designs is investigated. Based on these results, problems related to practical micro-machining and solutions with respect to possible sensor realizations are discussed. The evolution of different sensor generations is shown.