A torsional sensor for MEMS-based RMS voltage measurements

Dittmer, J.; Judaschke, R.; Büttgenbach, S.

doi:https://doi.org/10.5194/ars-6-31-2008

Articles | Volume 6

https://doi.org/10.5194/ars-6-31-2008

© Author(s) 2008. This work is distributed under
the Creative Commons Attribution 3.0 License.

https://doi.org/10.5194/ars-6-31-2008

© Author(s) 2008. This work is distributed under
the Creative Commons Attribution 3.0 License.

Articles | Volume 6

26 May 2008

| 26 May 2008

A torsional sensor for MEMS-based RMS voltage measurements

J. Dittmer, R. Judaschke, and S. Büttgenbach

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Total article views: 1,798 (including HTML, PDF, and XML)

HTML	PDF	XML	Total	BibTeX	EndNote
704	965	129	1,798	150	174

HTML: 704
PDF: 965
XML: 129
Total: 1,798
BibTeX: 150
EndNote: 174

Views and downloads (calculated since 01 Feb 2013)

Month	HTML	PDF	XML	Total
Feb 2013	1	15	1	17
Mar 2013	3	23	4	30
Apr 2013	2	14	0	16
May 2013	1	13	1	15
Jun 2013	1	13	0	14
Jul 2013	1	8	0	9
Aug 2013	7	0	7
Sep 2013	5	12	1	18
Oct 2013	1	12	0	13
Nov 2013	1	6	0	7
Dec 2013	4	10	2	16
Jan 2014	2	11	2	15
Feb 2014	5	10	4	19
Mar 2014	1	8	0	9
Apr 2014	6	8	0	14
May 2014	1	12	0	13
Jun 2014	1	9	0	10
Jul 2014	3	18	2	23
Aug 2014	2	21	0	23
Sep 2014	1	12	0	13
Oct 2014	2	11	0	13
Nov 2014	29	21	0	50
Dec 2014	2	14	2	18
Jan 2015	8	0	8
Feb 2015	4	2	1	7
Mar 2015	8	8	0	16
Apr 2015	10	3	0	13
May 2015	4	5	1	10
Jun 2015	21	0	21
Jul 2015	12	0	12
Aug 2015	3	4	0	7
Sep 2015	2	2	1	5
Oct 2015	6	1	0	7
Nov 2015	11	2	0	13
Dec 2015	2	1	0	3
Jan 2016	10	8	0	18
Feb 2016	10	10	1	21
Mar 2016	8	3	0	11
Apr 2016	5	5	0	10
May 2016	7	3	0	10
Jun 2016	4	2	0	6
Jul 2016	6	4	1	11
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Oct 2016	2	3	0	5
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Dec 2016	3	1	0	4
Jan 2017	6	2	1	9
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Mar 2017	7	2	2	11
Apr 2017	6	3	0	9
May 2017	9	3	1	13
Jun 2017	8	4	0	12
Jul 2017	9	7	2	18
Aug 2017	3	6	0	9
Sep 2017	4	9	0	13
Oct 2017	7	0	7
Nov 2017	3	0	3
Dec 2017	3	7	1	11
Jan 2018	3	9	0	12
Feb 2018	2	1	0	3
Mar 2018	7	5	0	12
Apr 2018	4	6	2	12
May 2018	9	7	3	19
Jun 2018	2	7	1	10
Jul 2018	4	6	1	11
Aug 2018	13	4	1	18
Sep 2018	6	7	1	14
Oct 2018	1	4	0	5
Nov 2018	4	6	1	11
Dec 2018	4	6	0	10
Jan 2019	5	7	0	12
Feb 2019	5	6	1	12
Mar 2019	4	7	1	12
Apr 2019	2	4	1	7
May 2019	3	4	1	8
Jun 2019	3	4	0	7
Jul 2019	2	3	0	5
Aug 2019	2	4	0	6
Sep 2019	2	0	2
Oct 2019	2	2	1	5
Nov 2019	3	8	0	11
Dec 2019	1	3	0	4
Jan 2020	4	3	0	7
Feb 2020	7	3	1	11
Mar 2020	1	6	0	7
Apr 2020	2	5	1	8
May 2020	2	3	1	6
Jun 2020	18	4	1	23
Jul 2020	42	38	35	115
Aug 2020	3	5	2	10
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Oct 2020	2	5	0	7
Nov 2020	5	6	0	11
Dec 2020	4	6	0	10
Jan 2021	6	5	0	11
Feb 2021	2	3	0	5
Mar 2021	4	3	0	7
Apr 2021	4	3	0	7
May 2021	8	8	2	18
Jun 2021	5	2	0	7
Jul 2021	2	4	0	6
Aug 2021	5	3	0	8
Sep 2021	5	5	0	10
Oct 2021	2	17	0	19
Nov 2021	2	10	0	12
Dec 2021	5	1	0	6
Jan 2022	7	7	0	14
Feb 2022	4	4	1	9
Mar 2022	2	5	0	7
Apr 2022	2	0	2
May 2022	2	3	1	6
Jun 2022	4	2	0	6
Jul 2022	3	0	3
Aug 2022	2	3	0	5
Sep 2022	5	2	1	8
Oct 2022	4	1	0	5
Nov 2022	1	4	0	5
Dec 2022	5	4	0	9
Jan 2023	3	4	0	7
Feb 2023	4	4	0	8
Mar 2023	5	2	1	8
Apr 2023	4	0	4
May 2023	4	2	0	6
Jun 2023	1	1	1	3
Jul 2023	2	5	0	7
Aug 2023	1	3	0	4
Sep 2023	1	2	1	4
Oct 2023	7	4	1	12
Nov 2023	1	1	0	2
Dec 2023	1	0	1
Jan 2024	1	0	1
Feb 2024	4	2	0	6
Mar 2024	4	7	2	13
Apr 2024	2	2	1	5
May 2024	3	2	1	6
Jun 2024	9	3	2	14
Jul 2024	13	3	7	23
Aug 2024	4	4	8	16
Sep 2024	3	3	4	10
Oct 2024	10	16	0	26
Nov 2024	3	91	0	94
Dec 2024	2	17	0	19
Jan 2025	7	0	7
Feb 2025	9	4	0	13
Mar 2025	7	3	3	13
Apr 2025	4	8	0	12
May 2025	8	3	2	13
Jun 2025	11	3	1	15
Jul 2025	6	8	1	15
Aug 2025	12	10	0	22
Sep 2025	6	3	0	9

Cumulative views and downloads (calculated since 01 Feb 2013)

Month	HTML	PDF	XML	Total
Feb 2013	1	15	1	17
Mar 2013	3	23	4	30
Apr 2013	2	14	0	16
May 2013	1	13	1	15
Jun 2013	1	13	0	14
Jul 2013	1	8	0	9
Aug 2013	7	0	7
Sep 2013	5	12	1	18
Oct 2013	1	12	0	13
Nov 2013	1	6	0	7
Dec 2013	4	10	2	16
Jan 2014	2	11	2	15
Feb 2014	5	10	4	19
Mar 2014	1	8	0	9
Apr 2014	6	8	0	14
May 2014	1	12	0	13
Jun 2014	1	9	0	10
Jul 2014	3	18	2	23
Aug 2014	2	21	0	23
Sep 2014	1	12	0	13
Oct 2014	2	11	0	13
Nov 2014	29	21	0	50
Dec 2014	2	14	2	18
Jan 2015	8	0	8
Feb 2015	4	2	1	7
Mar 2015	8	8	0	16
Apr 2015	10	3	0	13
May 2015	4	5	1	10
Jun 2015	21	0	21
Jul 2015	12	0	12
Aug 2015	3	4	0	7
Sep 2015	2	2	1	5
Oct 2015	6	1	0	7
Nov 2015	11	2	0	13
Dec 2015	2	1	0	3
Jan 2016	10	8	0	18
Feb 2016	10	10	1	21
Mar 2016	8	3	0	11
Apr 2016	5	5	0	10
May 2016	7	3	0	10
Jun 2016	4	2	0	6
Jul 2016	6	4	1	11
Aug 2016	3	6	0	9
Sep 2016	3	1	0	4
Oct 2016	2	3	0	5
Nov 2016	3	2	1	6
Dec 2016	3	1	0	4
Jan 2017	6	2	1	9
Feb 2017	2	0	2
Mar 2017	7	2	2	11
Apr 2017	6	3	0	9
May 2017	9	3	1	13
Jun 2017	8	4	0	12
Jul 2017	9	7	2	18
Aug 2017	3	6	0	9
Sep 2017	4	9	0	13
Oct 2017	7	0	7
Nov 2017	3	0	3
Dec 2017	3	7	1	11
Jan 2018	3	9	0	12
Feb 2018	2	1	0	3
Mar 2018	7	5	0	12
Apr 2018	4	6	2	12
May 2018	9	7	3	19
Jun 2018	2	7	1	10
Jul 2018	4	6	1	11
Aug 2018	13	4	1	18
Sep 2018	6	7	1	14
Oct 2018	1	4	0	5
Nov 2018	4	6	1	11
Dec 2018	4	6	0	10
Jan 2019	5	7	0	12
Feb 2019	5	6	1	12
Mar 2019	4	7	1	12
Apr 2019	2	4	1	7
May 2019	3	4	1	8
Jun 2019	3	4	0	7
Jul 2019	2	3	0	5
Aug 2019	2	4	0	6
Sep 2019	2	0	2
Oct 2019	2	2	1	5
Nov 2019	3	8	0	11
Dec 2019	1	3	0	4
Jan 2020	4	3	0	7
Feb 2020	7	3	1	11
Mar 2020	1	6	0	7
Apr 2020	2	5	1	8
May 2020	2	3	1	6
Jun 2020	18	4	1	23
Jul 2020	42	38	35	115
Aug 2020	3	5	2	10
Sep 2020	3	3	0	6
Oct 2020	2	5	0	7
Nov 2020	5	6	0	11
Dec 2020	4	6	0	10
Jan 2021	6	5	0	11
Feb 2021	2	3	0	5
Mar 2021	4	3	0	7
Apr 2021	4	3	0	7
May 2021	8	8	2	18
Jun 2021	5	2	0	7
Jul 2021	2	4	0	6
Aug 2021	5	3	0	8
Sep 2021	5	5	0	10
Oct 2021	2	17	0	19
Nov 2021	2	10	0	12
Dec 2021	5	1	0	6
Jan 2022	7	7	0	14
Feb 2022	4	4	1	9
Mar 2022	2	5	0	7
Apr 2022	2	0	2
May 2022	2	3	1	6
Jun 2022	4	2	0	6
Jul 2022	3	0	3
Aug 2022	2	3	0	5
Sep 2022	5	2	1	8
Oct 2022	4	1	0	5
Nov 2022	1	4	0	5
Dec 2022	5	4	0	9
Jan 2023	3	4	0	7
Feb 2023	4	4	0	8
Mar 2023	5	2	1	8
Apr 2023	4	0	4
May 2023	4	2	0	6
Jun 2023	1	1	1	3
Jul 2023	2	5	0	7
Aug 2023	1	3	0	4
Sep 2023	1	2	1	4
Oct 2023	7	4	1	12
Nov 2023	1	1	0	2
Dec 2023	1	0	1
Jan 2024	1	0	1
Feb 2024	4	2	0	6
Mar 2024	4	7	2	13
Apr 2024	2	2	1	5
May 2024	3	2	1	6
Jun 2024	9	3	2	14
Jul 2024	13	3	7	23
Aug 2024	4	4	8	16
Sep 2024	3	3	4	10
Oct 2024	10	16	0	26
Nov 2024	3	91	0	94
Dec 2024	2	17	0	19
Jan 2025	7	0	7
Feb 2025	9	4	0	13
Mar 2025	7	3	3	13
Apr 2025	4	8	0	12
May 2025	8	3	2	13
Jun 2025	11	3	1	15
Jul 2025	6	8	1	15
Aug 2025	12	10	0	22
Sep 2025	6	3	0	9

Latest update: 18 Sep 2025