Numerical modelling of nonlinear electromechanical coupling of an atomic force microscope with finite element method

Freitag, J.; Mathis, W.

doi:https://doi.org/10.5194/ars-8-33-2010

Articles | Volume 8

https://doi.org/10.5194/ars-8-33-2010

© Author(s) 2010. This work is distributed under
the Creative Commons Attribution 3.0 License.

https://doi.org/10.5194/ars-8-33-2010

© Author(s) 2010. This work is distributed under
the Creative Commons Attribution 3.0 License.

Articles | Volume 8

30 Sep 2010

| 30 Sep 2010

Numerical modelling of nonlinear electromechanical coupling of an atomic force microscope with finite element method

J. Freitag and W. Mathis

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Numerical modelling of nonlinear electromechanical coupling of an atomic force microscope with finite element method

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