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Volume 10
ARS, 10, 13–18, 2012
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https://doi.org/10.5194/ars-10-13-2012
© Author(s) 2012. This work is distributed under
the Creative Commons Attribution 3.0 License.
https://doi.org/10.5194/ars-10-13-2012
© Author(s) 2012. This work is distributed under
the Creative Commons Attribution 3.0 License.
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18 Sep 2012
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18 Sep 2012
Broadband transitions for membrane-based coplanar waveguides on highly-conductive silicon substrates
M. Rohland
,
U. Arz
,
K. Kuhlmann
,
and
S. Büttgenbach
M. Rohland
×
Physikalisch-Technische Bundesanstalt, 38116 Braunschweig, Germany
Institut für Mikrotechnik, Langer Kamp 8, 38106 Braunschweig, Germany
U. Arz
×
Physikalisch-Technische Bundesanstalt, 38116 Braunschweig, Germany
K. Kuhlmann
×
Physikalisch-Technische Bundesanstalt, 38116 Braunschweig, Germany
S. Büttgenbach
×
Institut für Mikrotechnik, Langer Kamp 8, 38106 Braunschweig, Germany
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