Broadband transitions for membrane-based coplanar waveguides on highly-conductive silicon substrates

Abstract. We present a transition from a contact structure built on highly-conductive silicon to a coplanar waveguide (CPW) fabricated in membrane technology. Test structures were fabricated and measured. The silicon-to-membrane transition is suitable for on-wafer probing and provides less than −10 dB measured reflection in the frequency range from 1 to 110 GHz. Measured and calculated values of the propagation constant of the membrane CPW agree well in the entire frequency range.