Simultaneous large-scale reliability analysis of ultra-thin MOS gate dielectrics using an automated test system

Domdey, A.; Hafkemeyer, K. M.; Krautschneider, W. H.; Schroeder, D.

doi:https://doi.org/10.5194/ars-6-205-2008

Articles | Volume 6

https://doi.org/10.5194/ars-6-205-2008

© Author(s) 2008. This work is distributed under
the Creative Commons Attribution 3.0 License.

https://doi.org/10.5194/ars-6-205-2008

© Author(s) 2008. This work is distributed under
the Creative Commons Attribution 3.0 License.

Articles | Volume 6

26 May 2008

| 26 May 2008

Simultaneous large-scale reliability analysis of ultra-thin MOS gate dielectrics using an automated test system

A. Domdey, K. M. Hafkemeyer, W. H. Krautschneider, and D. Schroeder

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Month	HTML	PDF	XML	Total
Feb 2013	1	8	1	10
Mar 2013	3	9	3	15
Apr 2013	2	6	0	8
May 2013	3	14	1	18
Jun 2013	6	0	6
Jul 2013	1	8	0	9
Aug 2013	3	0	3
Sep 2013	2	8	1	11
Oct 2013	1	6	1	8
Nov 2013	6	0	6
Dec 2013	3	11	3	17
Jan 2014	2	9	1	12
Feb 2014	5	8	4	17
Mar 2014	1	11	0	12
Apr 2014	4	8	0	12
May 2014	2	8	1	11
Jun 2014	1	5	0	6
Jul 2014	3	11	2	16
Aug 2014	2	6	0	8
Sep 2014	2	7	0	9
Oct 2014	2	6	0	8
Nov 2014	29	6	0	35
Dec 2014	2	11	2	15
Jan 2015	4	0	4
Feb 2015	4	1	1	6
Mar 2015	8	6	0	14
Apr 2015	10	1	0	11
May 2015	4	3	1	8
Jun 2015	21	1	0	22
Jul 2015	14	1	0	15
Aug 2015	3	4	0	7
Sep 2015	2	3	1	6
Oct 2015	6	6	0	12
Nov 2015	11	3	0	14
Dec 2015	2	1	0	3
Jan 2016	8	4	0	12
Feb 2016	6	10	1	17
Mar 2016	7	2	0	9
Apr 2016	5	1	0	6
May 2016	5	1	0	6
Jun 2016	3	2	0	5
Jul 2016	4	1	5
Aug 2016	3	5	0	8
Sep 2016	5	1	0	6
Oct 2016	2	2	0	4
Nov 2016	4	3	1	8
Dec 2016	3	2	0	5
Jan 2017	4	1	0	5
Feb 2017	2	0	2
Mar 2017	7	4	2	13
Apr 2017	5	1	0	6
May 2017	9	9	1	19
Jun 2017	8	2	0	10
Jul 2017	10	17	2	29
Aug 2017	2	11	0	13
Sep 2017	2	3	0	5
Oct 2017	1	3	0	4
Nov 2017	1	0	1
Dec 2017	5	5	2	12
Jan 2018	2	4	0	6
Feb 2018	2	3	1	6
Mar 2018	8	2	1	11
Apr 2018	6	8	2	16
May 2018	9	5	1	15
Jun 2018	1	3	1	5
Jul 2018	4	5	1	10
Aug 2018	7	4	1	12
Sep 2018	7	6	1	14
Oct 2018	1	5	0	6
Nov 2018	7	4	1	12
Dec 2018	3	4	0	7
Jan 2019	5	6	0	11
Feb 2019	6	5	0	11
Mar 2019	6	7	2	15
Apr 2019	7	5	0	12
May 2019	6	4	0	10
Jun 2019	3	7	1	11
Jul 2019	4	3	0	7
Aug 2019	2	6	0	8
Sep 2019	1	2	0	3
Oct 2019	1	2	1	4
Nov 2019	4	7	0	11
Dec 2019	2	4	0	6
Jan 2020	6	5	0	11
Feb 2020	2	4	1	7
Mar 2020	1	4	0	5
Apr 2020	1	2	0	3
May 2020	4	4	1	9
Jun 2020	20	7	1	28
Jul 2020	44	40	35	119
Aug 2020	4	3	3	10
Sep 2020	10	6	1	17
Oct 2020	4	2	0	6
Nov 2020	3	6	0	9
Dec 2020	4	2	0	6
Jan 2021	5	7	0	12
Feb 2021	3	2	0	5
Mar 2021	4	2	0	6
Apr 2021	4	3	0	7
May 2021	7	7	2	16
Jun 2021	5	6	0	11
Jul 2021	2	2	0	4
Aug 2021	7	6	0	13
Sep 2021	4	6	0	10
Oct 2021	3	17	0	20
Nov 2021	6	11	0	17
Dec 2021	5	4	0	9
Jan 2022	4	3	0	7
Feb 2022	4	4	1	9
Mar 2022	3	6	0	9
Apr 2022	4	1	0	5
May 2022	4	1	1	6
Jun 2022	4	3	1	8
Jul 2022	3	2	0	5
Aug 2022	3	1	0	4
Sep 2022	5	4	0	9
Oct 2022	5	4	1	10
Nov 2022	2	3	0	5
Dec 2022	7	8	0	15
Jan 2023	4	3	0	7
Feb 2023	5	2	0	7
Mar 2023	7	1	8
Apr 2023	1	0	1
May 2023	7	0	7
Jun 2023	4	4	1	9
Jul 2023	1	0	1
Aug 2023	1	1	0	2
Sep 2023	1	4	1	6
Oct 2023	3	2	1	6
Nov 2023	1	1	0	2
Dec 2023	2	2	0	4
Jan 2024	2	0	2
Feb 2024	2	0	2
Mar 2024	3	6	0	9
Apr 2024	3	3	2	8
May 2024	11	2	5	18
Jun 2024	5	3	2	10
Jul 2024	14	6	3	23
Aug 2024	4	3	4	11
Sep 2024	2	2	2	6
Oct 2024	2	1	0	3
Nov 2024	3	3	1	7
Dec 2024	0
Jan 2025	3	0	3

Cumulative views and downloads (calculated since 01 Feb 2013)

Month	HTML	PDF	XML	Total
Feb 2013	1	8	1	10
Mar 2013	3	9	3	15
Apr 2013	2	6	0	8
May 2013	3	14	1	18
Jun 2013	6	0	6
Jul 2013	1	8	0	9
Aug 2013	3	0	3
Sep 2013	2	8	1	11
Oct 2013	1	6	1	8
Nov 2013	6	0	6
Dec 2013	3	11	3	17
Jan 2014	2	9	1	12
Feb 2014	5	8	4	17
Mar 2014	1	11	0	12
Apr 2014	4	8	0	12
May 2014	2	8	1	11
Jun 2014	1	5	0	6
Jul 2014	3	11	2	16
Aug 2014	2	6	0	8
Sep 2014	2	7	0	9
Oct 2014	2	6	0	8
Nov 2014	29	6	0	35
Dec 2014	2	11	2	15
Jan 2015	4	0	4
Feb 2015	4	1	1	6
Mar 2015	8	6	0	14
Apr 2015	10	1	0	11
May 2015	4	3	1	8
Jun 2015	21	1	0	22
Jul 2015	14	1	0	15
Aug 2015	3	4	0	7
Sep 2015	2	3	1	6
Oct 2015	6	6	0	12
Nov 2015	11	3	0	14
Dec 2015	2	1	0	3
Jan 2016	8	4	0	12
Feb 2016	6	10	1	17
Mar 2016	7	2	0	9
Apr 2016	5	1	0	6
May 2016	5	1	0	6
Jun 2016	3	2	0	5
Jul 2016	4	1	5
Aug 2016	3	5	0	8
Sep 2016	5	1	0	6
Oct 2016	2	2	0	4
Nov 2016	4	3	1	8
Dec 2016	3	2	0	5
Jan 2017	4	1	0	5
Feb 2017	2	0	2
Mar 2017	7	4	2	13
Apr 2017	5	1	0	6
May 2017	9	9	1	19
Jun 2017	8	2	0	10
Jul 2017	10	17	2	29
Aug 2017	2	11	0	13
Sep 2017	2	3	0	5
Oct 2017	1	3	0	4
Nov 2017	1	0	1
Dec 2017	5	5	2	12
Jan 2018	2	4	0	6
Feb 2018	2	3	1	6
Mar 2018	8	2	1	11
Apr 2018	6	8	2	16
May 2018	9	5	1	15
Jun 2018	1	3	1	5
Jul 2018	4	5	1	10
Aug 2018	7	4	1	12
Sep 2018	7	6	1	14
Oct 2018	1	5	0	6
Nov 2018	7	4	1	12
Dec 2018	3	4	0	7
Jan 2019	5	6	0	11
Feb 2019	6	5	0	11
Mar 2019	6	7	2	15
Apr 2019	7	5	0	12
May 2019	6	4	0	10
Jun 2019	3	7	1	11
Jul 2019	4	3	0	7
Aug 2019	2	6	0	8
Sep 2019	1	2	0	3
Oct 2019	1	2	1	4
Nov 2019	4	7	0	11
Dec 2019	2	4	0	6
Jan 2020	6	5	0	11
Feb 2020	2	4	1	7
Mar 2020	1	4	0	5
Apr 2020	1	2	0	3
May 2020	4	4	1	9
Jun 2020	20	7	1	28
Jul 2020	44	40	35	119
Aug 2020	4	3	3	10
Sep 2020	10	6	1	17
Oct 2020	4	2	0	6
Nov 2020	3	6	0	9
Dec 2020	4	2	0	6
Jan 2021	5	7	0	12
Feb 2021	3	2	0	5
Mar 2021	4	2	0	6
Apr 2021	4	3	0	7
May 2021	7	7	2	16
Jun 2021	5	6	0	11
Jul 2021	2	2	0	4
Aug 2021	7	6	0	13
Sep 2021	4	6	0	10
Oct 2021	3	17	0	20
Nov 2021	6	11	0	17
Dec 2021	5	4	0	9
Jan 2022	4	3	0	7
Feb 2022	4	4	1	9
Mar 2022	3	6	0	9
Apr 2022	4	1	0	5
May 2022	4	1	1	6
Jun 2022	4	3	1	8
Jul 2022	3	2	0	5
Aug 2022	3	1	0	4
Sep 2022	5	4	0	9
Oct 2022	5	4	1	10
Nov 2022	2	3	0	5
Dec 2022	7	8	0	15
Jan 2023	4	3	0	7
Feb 2023	5	2	0	7
Mar 2023	7	1	8
Apr 2023	1	0	1
May 2023	7	0	7
Jun 2023	4	4	1	9
Jul 2023	1	0	1
Aug 2023	1	1	0	2
Sep 2023	1	4	1	6
Oct 2023	3	2	1	6
Nov 2023	1	1	0	2
Dec 2023	2	2	0	4
Jan 2024	2	0	2
Feb 2024	2	0	2
Mar 2024	3	6	0	9
Apr 2024	3	3	2	8
May 2024	11	2	5	18
Jun 2024	5	3	2	10
Jul 2024	14	6	3	23
Aug 2024	4	3	4	11
Sep 2024	2	2	2	6
Oct 2024	2	1	0	3
Nov 2024	3	3	1	7
Dec 2024	0
Jan 2025	3	0	3

Latest update: 22 Jan 2025