Articles | Volume 6
https://doi.org/10.5194/ars-6-205-2008
https://doi.org/10.5194/ars-6-205-2008
26 May 2008
 | 26 May 2008

Simultaneous large-scale reliability analysis of ultra-thin MOS gate dielectrics using an automated test system

A. Domdey, K. M. Hafkemeyer, W. H. Krautschneider, and D. Schroeder

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