Simultaneous large-scale reliability analysis of ultra-thin MOS gate dielectrics using an automated test system

Domdey, A.; Hafkemeyer, K. M.; Krautschneider, W. H.; Schroeder, D.

doi:https://doi.org/10.5194/ars-6-205-2008

Articles | Volume 6

https://doi.org/10.5194/ars-6-205-2008

© Author(s) 2008. This work is distributed under
the Creative Commons Attribution 3.0 License.

https://doi.org/10.5194/ars-6-205-2008

© Author(s) 2008. This work is distributed under
the Creative Commons Attribution 3.0 License.

Articles | Volume 6

26 May 2008

| 26 May 2008

Simultaneous large-scale reliability analysis of ultra-thin MOS gate dielectrics using an automated test system

A. Domdey, K. M. Hafkemeyer, W. H. Krautschneider, and D. Schroeder

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Latest update: 14 Dec 2024