Benefits of on-wafer calibration standards fabricated in membrane technology

Rohland, M.; Arz, U.; Büttgenbach, S.

doi:https://doi.org/10.5194/ars-9-19-2011

Articles | Volume 9

https://doi.org/10.5194/ars-9-19-2011

© Author(s) 2011. This work is distributed under
the Creative Commons Attribution 3.0 License.

https://doi.org/10.5194/ars-9-19-2011

© Author(s) 2011. This work is distributed under
the Creative Commons Attribution 3.0 License.

Articles | Volume 9

29 Jul 2011

| 29 Jul 2011

Benefits of on-wafer calibration standards fabricated in membrane technology

M. Rohland, U. Arz, and S. Büttgenbach

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Total article views: 1,394 (including HTML, PDF, and XML)

HTML	PDF	XML	Total	BibTeX	EndNote
653	631	110	1,394	122	107

HTML: 653
PDF: 631
XML: 110
Total: 1,394
BibTeX: 122
EndNote: 107

Views and downloads (calculated since 01 Feb 2013)

Month	HTML	PDF	XML	Total
Feb 2013	1	8	1	10
Mar 2013	4	8	3	15
Apr 2013	2	8	0	10
May 2013	2	10	1	13
Jun 2013	1	6	0	7
Jul 2013	2	9	0	11
Aug 2013	3	0	3
Sep 2013	4	6	2	12
Oct 2013	1	5	0	6
Nov 2013	3	10	0	13
Dec 2013	2	8	3	13
Jan 2014	7	13	2	22
Feb 2014	5	7	3	15
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Apr 2014	6	5	0	11
May 2014	1	8	0	9
Jun 2014	5	0	5
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Oct 2014	4	8	0	12
Nov 2014	1	8	0	9
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Jan 2015	2	11	0	13
Feb 2015	6	2	1	9
Mar 2015	9	6	0	15
Apr 2015	11	1	0	12
May 2015	4	4	1	9
Jun 2015	20	1	0	21
Jul 2015	13	6	0	19
Aug 2015	3	4	0	7
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May 2016	7	3	1	11
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Jan 2018	1	4	0	5
Feb 2018	2	1	1	4
Mar 2018	9	5	1	15
Apr 2018	7	7	2	16
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Jun 2018	1	0	1
Jul 2018	6	3	1	10
Aug 2018	7	3	1	11
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Nov 2018	6	4	1	11
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Jan 2019	6	4	0	10
Feb 2019	5	5	0	10
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Apr 2019	6	4	2	12
May 2019	3	6	1	10
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Feb 2020	6	4	1	11
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Jul 2020	46	34	40	120
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Oct 2022	4	1	0	5
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Feb 2023	2	4	0	6
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Apr 2023	0
May 2023	5	4	0	9
Jun 2023	4	3	1	8
Jul 2023	1	0	1
Aug 2023	1	3	0	4
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Nov 2023	0
Dec 2023	2	1	0	3
Jan 2024	0
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Mar 2024	1	4	0	5
Apr 2024	3	2	1	6
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Jun 2024	7	5	2	14
Jul 2024	10	5	2	17
Aug 2024	6	1	2	9
Sep 2024	4	5	1	10
Oct 2024	3	2	0	5
Nov 2024	2	1	0	3

Cumulative views and downloads (calculated since 01 Feb 2013)

Month	HTML	PDF	XML	Total
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Mar 2013	4	8	3	15
Apr 2013	2	8	0	10
May 2013	2	10	1	13
Jun 2013	1	6	0	7
Jul 2013	2	9	0	11
Aug 2013	3	0	3
Sep 2013	4	6	2	12
Oct 2013	1	5	0	6
Nov 2013	3	10	0	13
Dec 2013	2	8	3	13
Jan 2014	7	13	2	22
Feb 2014	5	7	3	15
Mar 2014	1	13	0	14
Apr 2014	6	5	0	11
May 2014	1	8	0	9
Jun 2014	5	0	5
Jul 2014	3	9	2	14
Aug 2014	1	11	0	12
Sep 2014	2	7	0	9
Oct 2014	4	8	0	12
Nov 2014	1	8	0	9
Dec 2014	2	5	2	9
Jan 2015	2	11	0	13
Feb 2015	6	2	1	9
Mar 2015	9	6	0	15
Apr 2015	11	1	0	12
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Jun 2015	20	1	0	21
Jul 2015	13	6	0	19
Aug 2015	3	4	0	7
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Jan 2016	12	8	0	20
Feb 2016	9	16	1	26
Mar 2016	7	5	0	12
Apr 2016	6	1	0	7
May 2016	7	3	1	11
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Jan 2024	0
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Apr 2024	3	2	1	6
May 2024	4	4	2	10
Jun 2024	7	5	2	14
Jul 2024	10	5	2	17
Aug 2024	6	1	2	9
Sep 2024	4	5	1	10
Oct 2024	3	2	0	5
Nov 2024	2	1	0	3

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Latest update: 23 Nov 2024

Benefits of on-wafer calibration standards fabricated in membrane technology

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