Benefits of on-wafer calibration standards fabricated in membrane technology

Rohland, M.; Arz, U.; Büttgenbach, S.

doi:10.5194/ars-9-19-2011

Articles | Volume 9

https://doi.org/10.5194/ars-9-19-2011

© Author(s) 2011. This work is distributed under
the Creative Commons Attribution 3.0 License.

https://doi.org/10.5194/ars-9-19-2011

© Author(s) 2011. This work is distributed under
the Creative Commons Attribution 3.0 License.

Articles | Volume 9

29 Jul 2011

| 29 Jul 2011

Benefits of on-wafer calibration standards fabricated in membrane technology

M. Rohland, U. Arz, and S. Büttgenbach

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Total article views: 1,598 (including HTML, PDF, and XML)

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780	693	125	1,598	146	189

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PDF: 693
XML: 125
Total: 1,598
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EndNote: 189

Views and downloads (calculated since 01 Feb 2013)

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Mar 2013	4	8	3	15
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May 2013	2	10	1	13
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Jul 2013	2	9	0	11
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Oct 2013	1	5	0	6
Nov 2013	3	10	0	13
Dec 2013	2	8	3	13
Jan 2014	7	13	2	22
Feb 2014	5	7	3	15
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May 2014	1	8	0	9
Jun 2014	5	0	5
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Jul 2015	13	6	0	19
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Apr 2016	6	1	0	7
May 2016	7	3	1	11
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Jan 2018	1	4	0	5
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Mar 2013	4	8	3	15
Apr 2013	2	8	0	10
May 2013	2	10	1	13
Jun 2013	1	6	0	7
Jul 2013	2	9	0	11
Aug 2013	3	0	3
Sep 2013	4	6	2	12
Oct 2013	1	5	0	6
Nov 2013	3	10	0	13
Dec 2013	2	8	3	13
Jan 2014	7	13	2	22
Feb 2014	5	7	3	15
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Apr 2014	6	5	0	11
May 2014	1	8	0	9
Jun 2014	5	0	5
Jul 2014	3	9	2	14
Aug 2014	1	11	0	12
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Jun 2015	20	1	0	21
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Nov 2015	11	1	0	12
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Feb 2016	9	16	1	26
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Apr 2016	6	1	0	7
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Apr 2023	0
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Oct 2024	3	2	0	5
Nov 2024	3	1	0	4
Dec 2024	1	2	2	5
Jan 2025	3	0	3
Feb 2025	9	1	0	10
Mar 2025	7	3	0	10
Apr 2025	10	2	1	13
May 2025	3	2	2	7
Jun 2025	14	2	0	16
Jul 2025	8	5	1	14
Aug 2025	7	6	0	13
Sep 2025	7	6	1	14
Oct 2025	15	12	2	29
Nov 2025	20	5	2	27
Dec 2025	14	12	3	29
Jan 2026	11	1	1	13

Latest update: 24 Jan 2026