Benefits of on-wafer calibration standards fabricated in membrane technology

Rohland, M.; Arz, U.; Büttgenbach, S.

doi:10.5194/ars-9-19-2011

Articles | Volume 9

https://doi.org/10.5194/ars-9-19-2011

© Author(s) 2011. This work is distributed under
the Creative Commons Attribution 3.0 License.

https://doi.org/10.5194/ars-9-19-2011

© Author(s) 2011. This work is distributed under
the Creative Commons Attribution 3.0 License.

Articles | Volume 9

29 Jul 2011

| 29 Jul 2011

Benefits of on-wafer calibration standards fabricated in membrane technology

M. Rohland, U. Arz, and S. Büttgenbach

Viewed

Total article views: 1,638 (including HTML, PDF, and XML)

HTML	PDF	XML	Total	BibTeX	EndNote
804	706	128	1,638	154	197

HTML: 804
PDF: 706
XML: 128
Total: 1,638
BibTeX: 154
EndNote: 197

Views and downloads (calculated since 01 Feb 2013)

Month	HTML	PDF	XML	Total
Feb 2013	1	8	1	10
Mar 2013	4	8	3	15
Apr 2013	2	8	0	10
May 2013	2	10	1	13
Jun 2013	1	6	0	7
Jul 2013	2	9	0	11
Aug 2013	3	0	3
Sep 2013	4	6	2	12
Oct 2013	1	5	0	6
Nov 2013	3	10	0	13
Dec 2013	2	8	3	13
Jan 2014	7	13	2	22
Feb 2014	5	7	3	15
Mar 2014	1	13	0	14
Apr 2014	6	5	0	11
May 2014	1	8	0	9
Jun 2014	5	0	5
Jul 2014	3	9	2	14
Aug 2014	1	11	0	12
Sep 2014	2	7	0	9
Oct 2014	4	8	0	12
Nov 2014	1	8	0	9
Dec 2014	2	5	2	9
Jan 2015	2	11	0	13
Feb 2015	6	2	1	9
Mar 2015	9	6	0	15
Apr 2015	11	1	0	12
May 2015	4	4	1	9
Jun 2015	20	1	0	21
Jul 2015	13	6	0	19
Aug 2015	3	4	0	7
Sep 2015	2	8	1	11
Oct 2015	6	0	6
Nov 2015	11	1	0	12
Dec 2015	2	1	0	3
Jan 2016	12	8	0	20
Feb 2016	9	16	1	26
Mar 2016	7	5	0	12
Apr 2016	6	1	0	7
May 2016	7	3	1	11
Jun 2016	4	2	0	6
Jul 2016	6	1	7
Aug 2016	4	2	0	6
Sep 2016	4	3	0	7
Oct 2016	2	2	0	4
Nov 2016	4	1	1	6
Dec 2016	4	2	0	6
Jan 2017	5	1	0	6
Feb 2017	3	0	3
Mar 2017	6	1	7
Apr 2017	6	0	6
May 2017	10	8	1	19
Jun 2017	8	6	0	14
Jul 2017	8	4	2	14
Aug 2017	2	3	0	5
Sep 2017	2	5	0	7
Oct 2017	3	4	0	7
Nov 2017	5	4	0	9
Dec 2017	4	5	1	10
Jan 2018	1	4	0	5
Feb 2018	2	1	1	4
Mar 2018	9	5	1	15
Apr 2018	7	7	2	16
May 2018	7	3	2	12
Jun 2018	1	0	1
Jul 2018	6	3	1	10
Aug 2018	7	3	1	11
Sep 2018	7	4	1	12
Oct 2018	3	4	0	7
Nov 2018	6	4	1	11
Dec 2018	5	5	0	10
Jan 2019	6	4	0	10
Feb 2019	5	5	0	10
Mar 2019	4	8	0	12
Apr 2019	6	4	2	12
May 2019	3	6	1	10
Jun 2019	4	3	1	8
Jul 2019	0
Aug 2019	6	0	6
Sep 2019	1	0	1
Oct 2019	2	6	2	10
Nov 2019	2	5	0	7
Dec 2019	3	7	0	10
Jan 2020	6	2	0	8
Feb 2020	6	4	1	11
Mar 2020	2	2	0	4
Apr 2020	1	2	0	3
May 2020	2	3	1	6
Jun 2020	17	5	0	22
Jul 2020	46	34	40	120
Aug 2020	7	4	3	14
Sep 2020	9	3	0	12
Oct 2020	1	6	0	7
Nov 2020	2	7	0	9
Dec 2020	6	3	0	9
Jan 2021	9	8	0	17
Feb 2021	2	3	0	5
Mar 2021	3	3	0	6
Apr 2021	4	3	0	7
May 2021	8	3	2	13
Jun 2021	6	2	0	8
Jul 2021	4	4	0	8
Aug 2021	12	5	0	17
Sep 2021	3	7	0	10
Oct 2021	5	12	0	17
Nov 2021	3	10	0	13
Dec 2021	6	3	0	9
Jan 2022	3	4	0	7
Feb 2022	3	1	1	5
Mar 2022	3	5	0	8
Apr 2022	4	2	0	6
May 2022	5	3	1	9
Jun 2022	3	3	0	6
Jul 2022	4	2	0	6
Aug 2022	3	2	0	5
Sep 2022	5	3	0	8
Oct 2022	4	1	0	5
Nov 2022	5	2	0	7
Dec 2022	5	4	0	9
Jan 2023	2	4	0	6
Feb 2023	2	4	0	6
Mar 2023	5	1	6
Apr 2023	0
May 2023	5	4	0	9
Jun 2023	4	3	1	8
Jul 2023	1	0	1
Aug 2023	1	3	0	4
Sep 2023	1	4	1	6
Oct 2023	1	1	2
Nov 2023	0
Dec 2023	2	1	0	3
Jan 2024	0
Feb 2024	2	0	2
Mar 2024	1	4	0	5
Apr 2024	3	2	1	6
May 2024	4	4	2	10
Jun 2024	7	5	2	14
Jul 2024	10	5	2	17
Aug 2024	6	1	2	9
Sep 2024	4	5	1	10
Oct 2024	3	2	0	5
Nov 2024	3	1	0	4
Dec 2024	1	2	2	5
Jan 2025	3	0	3
Feb 2025	9	1	0	10
Mar 2025	7	3	0	10
Apr 2025	10	2	1	13
May 2025	3	2	2	7
Jun 2025	14	2	0	16
Jul 2025	8	5	1	14
Aug 2025	7	6	0	13
Sep 2025	7	6	1	14
Oct 2025	15	12	2	29
Nov 2025	20	5	2	27
Dec 2025	14	12	3	29
Jan 2026	18	3	3	24
Feb 2026	10	8	1	19
Mar 2026	7	3	0	10

Cumulative views and downloads (calculated since 01 Feb 2013)

Month	HTML	PDF	XML	Total
Feb 2013	1	8	1	10
Mar 2013	4	8	3	15
Apr 2013	2	8	0	10
May 2013	2	10	1	13
Jun 2013	1	6	0	7
Jul 2013	2	9	0	11
Aug 2013	3	0	3
Sep 2013	4	6	2	12
Oct 2013	1	5	0	6
Nov 2013	3	10	0	13
Dec 2013	2	8	3	13
Jan 2014	7	13	2	22
Feb 2014	5	7	3	15
Mar 2014	1	13	0	14
Apr 2014	6	5	0	11
May 2014	1	8	0	9
Jun 2014	5	0	5
Jul 2014	3	9	2	14
Aug 2014	1	11	0	12
Sep 2014	2	7	0	9
Oct 2014	4	8	0	12
Nov 2014	1	8	0	9
Dec 2014	2	5	2	9
Jan 2015	2	11	0	13
Feb 2015	6	2	1	9
Mar 2015	9	6	0	15
Apr 2015	11	1	0	12
May 2015	4	4	1	9
Jun 2015	20	1	0	21
Jul 2015	13	6	0	19
Aug 2015	3	4	0	7
Sep 2015	2	8	1	11
Oct 2015	6	0	6
Nov 2015	11	1	0	12
Dec 2015	2	1	0	3
Jan 2016	12	8	0	20
Feb 2016	9	16	1	26
Mar 2016	7	5	0	12
Apr 2016	6	1	0	7
May 2016	7	3	1	11
Jun 2016	4	2	0	6
Jul 2016	6	1	7
Aug 2016	4	2	0	6
Sep 2016	4	3	0	7
Oct 2016	2	2	0	4
Nov 2016	4	1	1	6
Dec 2016	4	2	0	6
Jan 2017	5	1	0	6
Feb 2017	3	0	3
Mar 2017	6	1	7
Apr 2017	6	0	6
May 2017	10	8	1	19
Jun 2017	8	6	0	14
Jul 2017	8	4	2	14
Aug 2017	2	3	0	5
Sep 2017	2	5	0	7
Oct 2017	3	4	0	7
Nov 2017	5	4	0	9
Dec 2017	4	5	1	10
Jan 2018	1	4	0	5
Feb 2018	2	1	1	4
Mar 2018	9	5	1	15
Apr 2018	7	7	2	16
May 2018	7	3	2	12
Jun 2018	1	0	1
Jul 2018	6	3	1	10
Aug 2018	7	3	1	11
Sep 2018	7	4	1	12
Oct 2018	3	4	0	7
Nov 2018	6	4	1	11
Dec 2018	5	5	0	10
Jan 2019	6	4	0	10
Feb 2019	5	5	0	10
Mar 2019	4	8	0	12
Apr 2019	6	4	2	12
May 2019	3	6	1	10
Jun 2019	4	3	1	8
Jul 2019	0
Aug 2019	6	0	6
Sep 2019	1	0	1
Oct 2019	2	6	2	10
Nov 2019	2	5	0	7
Dec 2019	3	7	0	10
Jan 2020	6	2	0	8
Feb 2020	6	4	1	11
Mar 2020	2	2	0	4
Apr 2020	1	2	0	3
May 2020	2	3	1	6
Jun 2020	17	5	0	22
Jul 2020	46	34	40	120
Aug 2020	7	4	3	14
Sep 2020	9	3	0	12
Oct 2020	1	6	0	7
Nov 2020	2	7	0	9
Dec 2020	6	3	0	9
Jan 2021	9	8	0	17
Feb 2021	2	3	0	5
Mar 2021	3	3	0	6
Apr 2021	4	3	0	7
May 2021	8	3	2	13
Jun 2021	6	2	0	8
Jul 2021	4	4	0	8
Aug 2021	12	5	0	17
Sep 2021	3	7	0	10
Oct 2021	5	12	0	17
Nov 2021	3	10	0	13
Dec 2021	6	3	0	9
Jan 2022	3	4	0	7
Feb 2022	3	1	1	5
Mar 2022	3	5	0	8
Apr 2022	4	2	0	6
May 2022	5	3	1	9
Jun 2022	3	3	0	6
Jul 2022	4	2	0	6
Aug 2022	3	2	0	5
Sep 2022	5	3	0	8
Oct 2022	4	1	0	5
Nov 2022	5	2	0	7
Dec 2022	5	4	0	9
Jan 2023	2	4	0	6
Feb 2023	2	4	0	6
Mar 2023	5	1	6
Apr 2023	0
May 2023	5	4	0	9
Jun 2023	4	3	1	8
Jul 2023	1	0	1
Aug 2023	1	3	0	4
Sep 2023	1	4	1	6
Oct 2023	1	1	2
Nov 2023	0
Dec 2023	2	1	0	3
Jan 2024	0
Feb 2024	2	0	2
Mar 2024	1	4	0	5
Apr 2024	3	2	1	6
May 2024	4	4	2	10
Jun 2024	7	5	2	14
Jul 2024	10	5	2	17
Aug 2024	6	1	2	9
Sep 2024	4	5	1	10
Oct 2024	3	2	0	5
Nov 2024	3	1	0	4
Dec 2024	1	2	2	5
Jan 2025	3	0	3
Feb 2025	9	1	0	10
Mar 2025	7	3	0	10
Apr 2025	10	2	1	13
May 2025	3	2	2	7
Jun 2025	14	2	0	16
Jul 2025	8	5	1	14
Aug 2025	7	6	0	13
Sep 2025	7	6	1	14
Oct 2025	15	12	2	29
Nov 2025	20	5	2	27
Dec 2025	14	12	3	29
Jan 2026	18	3	3	24
Feb 2026	10	8	1	19
Mar 2026	7	3	0	10

Latest update: 20 Mar 2026