Benefits of on-wafer calibration standards fabricated in membrane technology

Rohland, M.; Arz, U.; Büttgenbach, S.

doi:https://doi.org/10.5194/ars-9-19-2011

Articles | Volume 9

https://doi.org/10.5194/ars-9-19-2011

© Author(s) 2011. This work is distributed under
the Creative Commons Attribution 3.0 License.

https://doi.org/10.5194/ars-9-19-2011

© Author(s) 2011. This work is distributed under
the Creative Commons Attribution 3.0 License.

Articles | Volume 9

29 Jul 2011

| 29 Jul 2011

Benefits of on-wafer calibration standards fabricated in membrane technology

M. Rohland, U. Arz, and S. Büttgenbach

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Total article views: 1,326 (including HTML, PDF, and XML)

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PDF: 608
XML: 101
Total: 1,326
BibTeX: 114
EndNote: 97

Views and downloads (calculated since 01 Feb 2013)

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Mar 2013	4	8	3	15
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May 2013	2	10	1	13
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Apr 2023	0
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Dec 2013	2	8	3	13
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Latest update: 28 Apr 2024

Benefits of on-wafer calibration standards fabricated in membrane technology

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