Articles | Volume 20
27 Apr 2023
 | 27 Apr 2023

Modeling and Analytical Description of Parasitic Probe Effects in Measurements of Conductor-Backed Coplanar Waveguides

Gia Ngoc Phung and Uwe Arz

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Cited articles

Amado-Rey, B., Tessmann, A., Campos-Roca, Y., Massler, H., Leuther, A., and Ambacher, O.: Spurious Mode Suppression in the Design of GCPW Submillimeter-wave Power Amplifiers, in: 2018 48th European Microwave Conference (EuMC), 23–27 September 2018, Madrid, Spain, IEEE, 851–854,, 2018.​​​​​​​ a
Arz, U., Kuhlmann, K., Dziomba, T., Hechtfischer, G., Phung, G. N., Schmückle, F. J., and Heinrich, W.: Traceable Coplanar Waveguide Calibrations on Fused Silica Substrates up to 110 GHz, IEEE T. Microw. Theory, 67, 2423–2432, 2019. a, b
CST Studio Suite: (last access: 25 April 2023), 2020. a, b
EMPIR: Microwave Measurements for Planar Circuits and Components, European Metrology Programme for Innovation and Research JRP Number 14IND02,, last access: 25 April 2023. a
Fregonese, S., De matos, M., Deng, M., Potereau, M., Ayela, C., Aufinger, K., and Zimmer, T.: On-Wafer Characterization of Silicon Transistors Up To 500 GHz and Analysis of Measurement Discontinuities Between the Frequency Bands, IEEE T. Microw. Theory, 66, 3332–3341, 2018. a
Short summary
This paper demonstrates how probe effects deteriorate mTRL-calibrated S-parameter measurements of conductor-backed CPW structures. A thorough study of CB-CPWs through field analysis is presented and for the first time an analytical description to predict the occurrence of ripples and resonance effects taking the probe geometries into account is presented. The analytical description is verified by em simulation and measurement for two different substrate materials, i.e. fused silica and alumina.