Yield-improving test and routing circuits for a novel 3-D interconnect technology

Bschorr, M.; Pfleiderer, H.-J.; Benkart, P.; Kaiser, A.; Munding, A.; Kohn, E.; Heittmann, A.; Hübner, H.; Ramacher, U.

doi:https://doi.org/10.5194/ars-4-225-2006

Articles | Volume 4

https://doi.org/10.5194/ars-4-225-2006

© Author(s) 2006. This work is licensed under
the Creative Commons Attribution-NonCommercial-ShareAlike 2.5 License.

https://doi.org/10.5194/ars-4-225-2006

© Author(s) 2006. This work is licensed under
the Creative Commons Attribution-NonCommercial-ShareAlike 2.5 License.

Articles | Volume 4

06 Sep 2006

| 06 Sep 2006

Yield-improving test and routing circuits for a novel 3-D interconnect technology

M. Bschorr, H.-J. Pfleiderer, P. Benkart, A. Kaiser, A. Munding, E. Kohn, A. Heittmann, H. Hübner, and U. Ramacher

Viewed

Total article views: 1,970 (including HTML, PDF, and XML)

HTML	PDF	XML	Total	BibTeX	EndNote
738	1,059	173	1,970	142	145

HTML: 738
PDF: 1,059
XML: 173
Total: 1,970
BibTeX: 142
EndNote: 145

Views and downloads (calculated since 01 Feb 2013)

Month	HTML	PDF	XML	Total
Feb 2013	2	6	1	9
Mar 2013	3	9	3	15
Apr 2013	2	5	0	7
May 2013	1	7	1	9
Jun 2013	7	0	7
Jul 2013	1	6	0	7
Aug 2013	3	0	3
Sep 2013	1	5	1	7
Oct 2013	1	7	0	8
Nov 2013	2	5	0	7
Dec 2013	5	8	3	16
Jan 2014	2	8	1	11
Feb 2014	5	9	4	18
Mar 2014	4	8	0	12
Apr 2014	3	7	0	10
May 2014	1	7	0	8
Jun 2014	1	7	0	8
Jul 2014	3	16	2	21
Aug 2014	1	7	0	8
Sep 2014	7	0	7
Oct 2014	2	7	0	9
Nov 2014	27	6	0	33
Dec 2014	2	6	2	10
Jan 2015	6	0	6
Feb 2015	4	3	1	8
Mar 2015	1	1	0	2
Apr 2015	2	3	0	5
May 2015	5	4	1	10
Jun 2015	20	4	0	24
Jul 2015	12	3	0	15
Aug 2015	3	6	0	9
Sep 2015	2	3	1	6
Oct 2015	7	9	0	16
Nov 2015	11	0	11
Dec 2015	2	1	0	3
Jan 2016	10	8	1	19
Feb 2016	7	9	1	17
Mar 2016	7	4	0	11
Apr 2016	6	1	0	7
May 2016	5	1	0	6
Jun 2016	6	3	0	9
Jul 2016	8	3	1	12
Aug 2016	3	3	0	6
Sep 2016	3	0	3
Oct 2016	4	3	1	8
Nov 2016	4	1	1	6
Dec 2016	3	2	0	5
Jan 2017	4	2	0	6
Feb 2017	3	0	3
Mar 2017	5	17	3	25
Apr 2017	6	11	4	21
May 2017	9	19	4	32
Jun 2017	12	16	4	32
Jul 2017	9	12	4	25
Aug 2017	2	16	3	21
Sep 2017	3	30	2	35
Oct 2017	2	17	3	22
Nov 2017	2	35	1	38
Dec 2017	5	44	3	52
Jan 2018	5	32	2	39
Feb 2018	2	25	3	30
Mar 2018	6	24	3	33
Apr 2018	4	35	6	45
May 2018	11	40	6	57
Jun 2018	4	23	6	33
Jul 2018	7	5	4	16
Aug 2018	6	7	6	19
Sep 2018	7	11	4	22
Oct 2018	4	16	2	22
Nov 2018	8	24	4	36
Dec 2018	3	8	0	11
Jan 2019	7	5	0	12
Feb 2019	6	7	1	14
Mar 2019	5	6	0	11
Apr 2019	5	3	0	8
May 2019	11	7	0	18
Jun 2019	5	7	1	13
Jul 2019	1	1	0	2
Aug 2019	4	9	0	13
Sep 2019	1	2	0	3
Oct 2019	3	4	1	8
Nov 2019	5	3	0	8
Dec 2019	9	0	9
Jan 2020	1	0	1
Feb 2020	1	5	1	7
Mar 2020	1	6	0	7
Apr 2020	2	4	0	6
May 2020	3	3	0	6
Jun 2020	20	5	0	25
Jul 2020	45	38	36	119
Aug 2020	3	2	3	8
Sep 2020	1	3	0	4
Oct 2020	7	2	1	10
Nov 2020	1	10	0	11
Dec 2020	4	4	0	8
Jan 2021	7	3	0	10
Feb 2021	2	6	0	8
Mar 2021	6	3	0	9
Apr 2021	3	3	0	6
May 2021	5	8	2	15
Jun 2021	7	7	0	14
Jul 2021	3	6	0	9
Aug 2021	2	1	0	3
Sep 2021	6	9	0	15
Oct 2021	1	14	0	15
Nov 2021	1	13	0	14
Dec 2021	9	2	0	11
Jan 2022	3	3	0	6
Feb 2022	4	3	1	8
Mar 2022	5	7	0	12
Apr 2022	4	7	0	11
May 2022	5	5	1	11
Jun 2022	3	2	0	5
Jul 2022	3	3	0	6
Aug 2022	2	4	0	6
Sep 2022	3	1	0	4
Oct 2022	4	3	0	7
Nov 2022	3	8	0	11
Dec 2022	5	4	0	9
Jan 2023	3	3	0	6
Feb 2023	3	2	0	5
Mar 2023	4	2	1	7
Apr 2023	2	1	0	3
May 2023	3	2	0	5
Jun 2023	3	3	0	6
Jul 2023	1	1	0	2
Aug 2023	1	2	0	3
Sep 2023	1	2	1	4
Oct 2023	7	3	1	11
Nov 2023	1	1	1	3
Dec 2023	3	4	0	7
Jan 2024	0
Feb 2024	2	3	0	5
Mar 2024	2	4	0	6
Apr 2024	3	4	1	8
May 2024	5	2	6	13
Jun 2024	8	1	1	10
Jul 2024	12	3	0	15
Aug 2024	5	1	2	8
Sep 2024	1	4	1	6
Oct 2024	2	2	1	5
Nov 2024	2	1	0	3
Dec 2024	0
Jan 2025	1	0	1
Feb 2025	16	5	2	23
Mar 2025	12	2	2	16
Apr 2025	2	1	0	3
May 2025	6	2	1	9
Jun 2025	25	4	0	29
Jul 2025	18	3	1	22
Aug 2025	10	6	0	16
Sep 2025	4	1	0	5

Cumulative views and downloads (calculated since 01 Feb 2013)

Month	HTML	PDF	XML	Total
Feb 2013	2	6	1	9
Mar 2013	3	9	3	15
Apr 2013	2	5	0	7
May 2013	1	7	1	9
Jun 2013	7	0	7
Jul 2013	1	6	0	7
Aug 2013	3	0	3
Sep 2013	1	5	1	7
Oct 2013	1	7	0	8
Nov 2013	2	5	0	7
Dec 2013	5	8	3	16
Jan 2014	2	8	1	11
Feb 2014	5	9	4	18
Mar 2014	4	8	0	12
Apr 2014	3	7	0	10
May 2014	1	7	0	8
Jun 2014	1	7	0	8
Jul 2014	3	16	2	21
Aug 2014	1	7	0	8
Sep 2014	7	0	7
Oct 2014	2	7	0	9
Nov 2014	27	6	0	33
Dec 2014	2	6	2	10
Jan 2015	6	0	6
Feb 2015	4	3	1	8
Mar 2015	1	1	0	2
Apr 2015	2	3	0	5
May 2015	5	4	1	10
Jun 2015	20	4	0	24
Jul 2015	12	3	0	15
Aug 2015	3	6	0	9
Sep 2015	2	3	1	6
Oct 2015	7	9	0	16
Nov 2015	11	0	11
Dec 2015	2	1	0	3
Jan 2016	10	8	1	19
Feb 2016	7	9	1	17
Mar 2016	7	4	0	11
Apr 2016	6	1	0	7
May 2016	5	1	0	6
Jun 2016	6	3	0	9
Jul 2016	8	3	1	12
Aug 2016	3	3	0	6
Sep 2016	3	0	3
Oct 2016	4	3	1	8
Nov 2016	4	1	1	6
Dec 2016	3	2	0	5
Jan 2017	4	2	0	6
Feb 2017	3	0	3
Mar 2017	5	17	3	25
Apr 2017	6	11	4	21
May 2017	9	19	4	32
Jun 2017	12	16	4	32
Jul 2017	9	12	4	25
Aug 2017	2	16	3	21
Sep 2017	3	30	2	35
Oct 2017	2	17	3	22
Nov 2017	2	35	1	38
Dec 2017	5	44	3	52
Jan 2018	5	32	2	39
Feb 2018	2	25	3	30
Mar 2018	6	24	3	33
Apr 2018	4	35	6	45
May 2018	11	40	6	57
Jun 2018	4	23	6	33
Jul 2018	7	5	4	16
Aug 2018	6	7	6	19
Sep 2018	7	11	4	22
Oct 2018	4	16	2	22
Nov 2018	8	24	4	36
Dec 2018	3	8	0	11
Jan 2019	7	5	0	12
Feb 2019	6	7	1	14
Mar 2019	5	6	0	11
Apr 2019	5	3	0	8
May 2019	11	7	0	18
Jun 2019	5	7	1	13
Jul 2019	1	1	0	2
Aug 2019	4	9	0	13
Sep 2019	1	2	0	3
Oct 2019	3	4	1	8
Nov 2019	5	3	0	8
Dec 2019	9	0	9
Jan 2020	1	0	1
Feb 2020	1	5	1	7
Mar 2020	1	6	0	7
Apr 2020	2	4	0	6
May 2020	3	3	0	6
Jun 2020	20	5	0	25
Jul 2020	45	38	36	119
Aug 2020	3	2	3	8
Sep 2020	1	3	0	4
Oct 2020	7	2	1	10
Nov 2020	1	10	0	11
Dec 2020	4	4	0	8
Jan 2021	7	3	0	10
Feb 2021	2	6	0	8
Mar 2021	6	3	0	9
Apr 2021	3	3	0	6
May 2021	5	8	2	15
Jun 2021	7	7	0	14
Jul 2021	3	6	0	9
Aug 2021	2	1	0	3
Sep 2021	6	9	0	15
Oct 2021	1	14	0	15
Nov 2021	1	13	0	14
Dec 2021	9	2	0	11
Jan 2022	3	3	0	6
Feb 2022	4	3	1	8
Mar 2022	5	7	0	12
Apr 2022	4	7	0	11
May 2022	5	5	1	11
Jun 2022	3	2	0	5
Jul 2022	3	3	0	6
Aug 2022	2	4	0	6
Sep 2022	3	1	0	4
Oct 2022	4	3	0	7
Nov 2022	3	8	0	11
Dec 2022	5	4	0	9
Jan 2023	3	3	0	6
Feb 2023	3	2	0	5
Mar 2023	4	2	1	7
Apr 2023	2	1	0	3
May 2023	3	2	0	5
Jun 2023	3	3	0	6
Jul 2023	1	1	0	2
Aug 2023	1	2	0	3
Sep 2023	1	2	1	4
Oct 2023	7	3	1	11
Nov 2023	1	1	1	3
Dec 2023	3	4	0	7
Jan 2024	0
Feb 2024	2	3	0	5
Mar 2024	2	4	0	6
Apr 2024	3	4	1	8
May 2024	5	2	6	13
Jun 2024	8	1	1	10
Jul 2024	12	3	0	15
Aug 2024	5	1	2	8
Sep 2024	1	4	1	6
Oct 2024	2	2	1	5
Nov 2024	2	1	0	3
Dec 2024	0
Jan 2025	1	0	1
Feb 2025	16	5	2	23
Mar 2025	12	2	2	16
Apr 2025	2	1	0	3
May 2025	6	2	1	9
Jun 2025	25	4	0	29
Jul 2025	18	3	1	22
Aug 2025	10	6	0	16
Sep 2025	4	1	0	5

Latest update: 10 Sep 2025