Articles | Volume 6
https://doi.org/10.5194/ars-6-265-2008
https://doi.org/10.5194/ars-6-265-2008
26 May 2008
 | 26 May 2008

Physical IC debug – backside approach and nanoscale challenge

C. Boit, R. Schlangen, A. Glowacki, U. Kindereit, T. Kiyan, U. Kerst, T. Lundquist, S. Kasapi, and H. Suzuki

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