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Volume 6
ARS, 6, 265–272, 2008
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https://doi.org/10.5194/ars-6-265-2008
© Author(s) 2008. This work is distributed under
the Creative Commons Attribution 3.0 License.
https://doi.org/10.5194/ars-6-265-2008
© Author(s) 2008. This work is distributed under
the Creative Commons Attribution 3.0 License.
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26 May 2008
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26 May 2008
Physical IC debug – backside approach and nanoscale challenge
C. Boit
,
R. Schlangen
,
A. Glowacki
,
U. Kindereit
,
T. Kiyan
,
U. Kerst
,
T. Lundquist
,
S. Kasapi
,
and
H. Suzuki
C. Boit
×
TUB Berlin University of Technology, Berlin, Germany
R. Schlangen
×
TUB Berlin University of Technology, Berlin, Germany
A. Glowacki
×
TUB Berlin University of Technology, Berlin, Germany
U. Kindereit
×
TUB Berlin University of Technology, Berlin, Germany
T. Kiyan
×
TUB Berlin University of Technology, Berlin, Germany
U. Kerst
×
TUB Berlin University of Technology, Berlin, Germany
T. Lundquist
×
DCG Systems, Fremont, CA, USA
S. Kasapi
×
NVIDIA, Santa Clara, CA, USA
H. Suzuki
×
Hamamatsu Photonics KK, Japan
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